Top chipmakers embrace ASML’s $400M machines, agree to crucial chipmaking change

Samsung Electronics and Taiwan Semiconductor Manufacturing Co. will install ASML’s next-generation high-NA EUV lithography tools, each costing up to $400 million, within several years. Alongside Intel, they have adopted a process change that can raise production yields on these machines by roughly 40 percent, enabling finer features for AI data-center chips and consumer devices.